International Journal of Extreme Manufacturing, Volume. 6, Issue 6, 62007(2024)
Design, modeling and control of high-bandwidth nano-positioning stages for ultra-precise measurement and manufacturing: a survey
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Huang Wei-Wei, Wang Xiangyuan, Meng Yixuan, Li Linlin, Zhang Xinquan, Ren Mingjun, Zhu Li-Min. Design, modeling and control of high-bandwidth nano-positioning stages for ultra-precise measurement and manufacturing: a survey[J]. International Journal of Extreme Manufacturing, 2024, 6(6): 62007
Paper Information
Category: Topical Review
Received: Dec. 24, 2023
Accepted: Feb. 13, 2025
Published Online: Feb. 13, 2025
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