International Journal of Extreme Manufacturing, Volume. 6, Issue 6, 62007(2024)

Design, modeling and control of high-bandwidth nano-positioning stages for ultra-precise measurement and manufacturing: a survey

Huang Wei-Wei, Wang Xiangyuan, Meng Yixuan, Li Linlin, Zhang Xinquan, Ren Mingjun, and Zhu Li-Min

High-bandwidth nano-positioning stages (NPSs) have boosted the advancement of modern ultra-precise, ultra-fast measurement and manufacturing technologies owing to their fast dynamic response, high stiffness and nanoscale resolution. However, the nonlinear actuation, lightly damped resonance and multi-axis cross-coupling effect bring significant challenges to the design, modeling and control of high-bandwidth NPSs. Consequently, numerous advanced works have been reported over the past decades to address these challenges. Here, this article provides a comprehensive review of high-bandwidth NPSs, which covers four representative aspects including mechanical design, system modeling, parameters optimization and high-bandwidth motion control. Besides, representative high-bandwidth NPSs applied to atomic force microscope and fast tool servo are highlighted. By providing an extensive overview of the design procedure for high-bandwidth NPSs, this review aims to offer a systemic solution for achieving operation with high speed, high accuracy and high resolution. Furthermore, remaining difficulties along with future developments in this fields are concluded and discussed.

Tools

Get Citation

Copy Citation Text

Huang Wei-Wei, Wang Xiangyuan, Meng Yixuan, Li Linlin, Zhang Xinquan, Ren Mingjun, Zhu Li-Min. Design, modeling and control of high-bandwidth nano-positioning stages for ultra-precise measurement and manufacturing: a survey[J]. International Journal of Extreme Manufacturing, 2024, 6(6): 62007

Download Citation

EndNote(RIS)BibTexPlain Text
Save article for my favorites
Paper Information

Category: Topical Review

Received: Dec. 24, 2023

Accepted: Feb. 13, 2025

Published Online: Feb. 13, 2025

The Author Email:

DOI:10.1088/2631-7990/ad6ecc

Topics