International Journal of Extreme Manufacturing, Volume. 6, Issue 6, 62007(2024)
Design, modeling and control of high-bandwidth nano-positioning stages for ultra-precise measurement and manufacturing: a survey
High-bandwidth nano-positioning stages (NPSs) have boosted the advancement of modern ultra-precise, ultra-fast measurement and manufacturing technologies owing to their fast dynamic response, high stiffness and nanoscale resolution. However, the nonlinear actuation, lightly damped resonance and multi-axis cross-coupling effect bring significant challenges to the design, modeling and control of high-bandwidth NPSs. Consequently, numerous advanced works have been reported over the past decades to address these challenges. Here, this article provides a comprehensive review of high-bandwidth NPSs, which covers four representative aspects including mechanical design, system modeling, parameters optimization and high-bandwidth motion control. Besides, representative high-bandwidth NPSs applied to atomic force microscope and fast tool servo are highlighted. By providing an extensive overview of the design procedure for high-bandwidth NPSs, this review aims to offer a systemic solution for achieving operation with high speed, high accuracy and high resolution. Furthermore, remaining difficulties along with future developments in this fields are concluded and discussed.
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Huang Wei-Wei, Wang Xiangyuan, Meng Yixuan, Li Linlin, Zhang Xinquan, Ren Mingjun, Zhu Li-Min. Design, modeling and control of high-bandwidth nano-positioning stages for ultra-precise measurement and manufacturing: a survey[J]. International Journal of Extreme Manufacturing, 2024, 6(6): 62007
Category: Topical Review
Received: Dec. 24, 2023
Accepted: Feb. 13, 2025
Published Online: Feb. 13, 2025
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