[1] [1] CHEBEN P, HALIR R, SCHMID J H, et al. Subwavelength integrated photonics [J]. Nature, 2018, 560(7720): 565-572.

[2] [2] CARR D W, SULLIVAN J P, FRIEDMANN T A. Laterally deformable nanomechanical zeroth-order gratings: anomalous diffraction studied by rigorous coupled-wave analysis[J]. Optics Letters, 2003, 28(18): 1636-1638.

[3] [3] CARR D W, KEELER B E N, SULLIVAN J P, et al. Measurement of a laterally deformable optical MEMS grating transducer[J]. Proc Spie, 2004, 5346: 56-63.

[4] [4] KEELER B E N, CARR D W, SULLIVAN J P, et al. Experimental demonstration of a laterally deformable optical nanoelectromechanical system grating transducer[J]. Optics Letters, 2004, 29(11): 1182-1184.

[5] [5] KEELER B E, BOGART G R, CARR D W. Laterally deformable optical NEMS grating transducers for inertial sensing applications[J]. Proc Spie, 2005(5592): 306-312.

[6] [6] OLSSON R H, KEELER B E N, CZAPLEWSKI D A, et al. Circuit Techniques for Reducing Low Frequency Noise in Optical MEMS Position and Inertial Sensors[C]// the IEEE International Symposium on Circuits & Systems, May 6-9, 2007, Albuquerque, USA. Albuquerque: Los Alamitos, 2007.

[7] [7] KRISHNAMOORTHY U, OLSSON R H, BOGART G R, et al. In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor [J]. Sensors and Actuators A: Physical, 2008, 145-146: 283-290.

[8] [8] YAO B Y, ZHEN Z, FENG L S, et al. Structural Design of a Compact in-Plane Nano-Grating Accelerometer[J]. Chinphyslett, 2012, 29(11): 1185021-1185025.

[9] [9] CHEN W, QIANBO L, JIAN B, et al. Highly sensitive lateral deformable optical MEMS displacement sensor: anomalous diffraction studied by rigorous coupled-wave analysis[J]. Applied Optics, 2015, 54(30): 8935-8943.

[10] [10] ROGERS A A A. Evanescent Wave Coupling Using Different Subwavelength Gratings for a MEMS Accelerometer[C]. University of South Florida: Dissertations & Theses - Gradworks, 2011.

[11] [11] ROGERS A A A, KEDIA S, SAMSON S, et al. Verification of evanescent coupling from subwavelength grating pairs[J]. Applied Physics B, 2011, 105(4): 833-837.

[12] [12] LI M, WANG Z, GENG H, et al. Structural design and simulation of a micro-gyroscope based on nano-grating detection[J]. 2019, 25(5): 1627-1637。

[14] [14] WOOD R W. On a Remarkable Case of Uneven Distribution of Light in a Diffraction Grating Spectrum[J]. Philosophical Magazine, 1902, 4(21): 396-402.