Optics and Precision Engineering, Volume. 24, Issue 1, 143(2016)
Linearity calibration platform of capacitive sensors
[2] [2] YAO J T, LI L J, XU Y D, et al.. Statically determinate measurement model and calibration method of statically indeterminate six-axis force sensor [J]. Chinese Journal of Science Instrument, 2013, 34(9): 1927-1933. (in Chinese)
[6] [6] HAITJEMA H, SCHELLEKENS P H J, WETZELS. Calibration of displacement sensors up to 300μm with nanometer accuracy and direct traceability to a primary standard of length [J]. Metrologia, 2000, 37: 25-33.
[7] [7] FLEMING A J. A review of nanometer resolution position sensors: Operation and performance [J]. Sensor and Actuators A, 2013, 190: 106-126.
[8] [8] BEER F P, JOHNSTON E R, DEWOLF J T, et al.. Mechanics of materials [M]. New York: McGraw-Hill, 2012.
[9] [9] YOUNG W C, BUDYNAS R G.Roarks formulas for stress and strain [M]. New York: McGraw-Hill, 2002.
[10] [10] LOBONTIU N. Compliant mechanisms: design of flexure hinges [M]. Florida: CRC Press, 2003.
[11] [11] LI Y M, XU Q S. Design and analysis of a totally decoupled flexure-based XY parallel micromanipulator [J]. IEEE Transactions on Robotics, 2009, 25(3): 645-657.
[12] [12] LI Y M, HUANG J M, TANG H. A compliant parallel XY micromotion stage with complete kinematic decoupling [J]. IEEE Transactions on Automation Science and Engineering, 2012, 9(3): 538-553.
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ZHANG De-fu, GE Chuan, LI Xian-ling, NI Ming-yang, GUO Kang. Linearity calibration platform of capacitive sensors[J]. Optics and Precision Engineering, 2016, 24(1): 143
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Received: Apr. 3, 2015
Accepted: --
Published Online: Mar. 22, 2016
The Author Email: De-fu ZHANG (zhangdf@sklao.ac.cn)