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Chinese Optics Letters, Volume. 7, Issue 10, 967(2009)

Optical properties and microstructure of Ta2O5 thin films prepared by oblique angle deposition

Xiudi Xiao1,2, Guoping Dong1,2, Hongbo He1, Hongji Qi1,3, Zhengxiu Fan1, and Jianda Shao1
Author Affiliations
  • 1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2Graduate University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Shanghai Daheng Optics and Fine Mechanics Co., Ltd., Shanghai 201800, China
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    Cited By

    [1] S. Tripathi, S. Maidul Haque, K. Divakar Rao, J. S. Misal, C. Pratap, N. K. Sahoo. Oxygen partial pressure dependent optical properties of glancing angle deposited (GLAD) Ta2O5 films deposited by magnetron sputtering, 1731, 080076(2016).

    [2] Bin Wang, Hong-Ji Qi, Wei Sun, Jun He, Jiao-Ling Zhao, Hu Wang, Yong-Qiang Hou. Homogeneity analysis of sculptured thin films deposited in symmetric style through glancing angle deposition technique. Chinese Physics B, 23, 117801(2014).

    [3] Jung Woo Leem, Jae Su Yu. Influence of oblique-angle sputtered transparent conducting oxides on performance of Si-based thin film solar cells. physica status solidi (a), 208, 2220(2011).

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    Xiudi Xiao, Guoping Dong, Hongbo He, Hongji Qi, Zhengxiu Fan, Jianda Shao. Optical properties and microstructure of Ta2O5 thin films prepared by oblique angle deposition[J]. Chinese Optics Letters, 2009, 7(10): 967

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    Paper Information

    Received: Dec. 22, 2008

    Accepted: --

    Published Online: Oct. 16, 2009

    The Author Email:

    DOI:10.3788/COL20090710.0967

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology