Acta Optica Sinica, Volume. 34, Issue 1, 123001(2014)
Beam Splitter with Two Fresnel Biprisms for Long Trace Profiler
[1] [1] Lin Weihao, Luo Hongxin, Song Li, et al.. Absolute flatness measurement of optical elements in synchrotron radiation [J]. Acta Optica Sinica, 2012, 32(9): 0912005.
[2] [2] Yuan Qun, Gao Zhishan, Li Jianxin, et al.. Research on techniques of fabrication and measurement about Fizeau infrared interferometer [J]. Chinese J Lasers, 2011, 38(8): 0808001.
[3] [3] Guo Renhui, Li Jianxin, Zhu Rihong, et al.. Research on the randomly phase shifting algorithm with wavelength tuning [J]. Chinese J Lasers, 2012, 39(5): 0508002.
[4] [4] V FPaz, S Peterhnsel, K Frenner, et al.. Solving the inverse grating problem by white light interference Fourier scatterometry [J]. Light: Science & Applications, 2012, 1(11): e36.
[6] [6] K V Bieren. Pencil beam interferometer for aspheric optical surfaces [C] . SPIE, 1982, 343: 101-108.
[7] [7] K Von Bieren. Interferometry of wave fronts reflected off conical surfaces [J]. Appl Opt, 1983, 22(14): 2109-2114.
[8] [8] P Z Takacs, S N Qian. Design of a long trace surface profiler [C]. SPIE, 1987, 749: 59-64.
[9] [9] P Z Takacs, S N Qian. Surface Profiling Interferometer [P]. US patent: U4884697, [1989-12-05].
[10] [10] Peter Z Takacs, Eugene L Church, Cynthia J Bresloff, et al.. Determining surface profile from sequential interference patterns from a long tracer profiler [J]. Rev Sci Instrum, 1999, 38(25): 5468-5479.
[11] [11] S N Qian, W Jark, P Z Takacs. The penta-prism LTP; a long-trace-profiler with stationary optical head and moving penta-prism [J]. Rev Sci Instrum, 1995, 66(3): 2562-2569.
[12] [12] S Qian, W H Jark, P Z Takacs, et al.. In situ surface profiler for high heat load mirror measurement [J]. Opt Eng, 1995, 34(2): 396-402.
[13] [13] H Li, P Z Takacs, T Oversluizen. Vertical scanning long trace profiler: a tool for metrology of X-ray mirrors [C]. SPIE, 1997, 3152: 180-187.
[15] [15] Y Zhao, Z Li, D Li, et al.. Principle of π-phase plate long trace profiler for synchrotron radiation optics [J]. Opt Commun, 2001, 200(1): 23-26.
[16] [16] D Zeng, T Xiao, G Du, et al.. New long trace profiler based on phase plate diffraction for optical metrology of SSRF [J]. Rev Sci Instrum, 2006, 77(9): 093305.
[17] [17] S N Qian, P Z Takacs. Portable long trace profiler: concept and solution [J]. Rev Sci Instrum, 2001, 72(8): 3198-3204.
[18] [18] Shinan Qian, Qiuping Wang, Yilin Hong, et al.. Multiple functions long trace profiler (LTP-MF) for national synchrotron radiation laboratory of China [C]. SPIE, 2005, 5921: 41-47.
[19] [19] S Qian, P Z Takacs. Equal optical path beam splitter for a pencil beam interferometer and shearing interferometer [J]. Opt Eng, 2003, 42(4): 929-934.
[20] [20] S C lrick. Determining surface profile from sequential interference patterns from a long tracer profiler [J]. Rev Sci Instrum, 1992, 63(1): 1432-1435.
[21] [21] Zhou Pin, He Zhengfeng. Matlab Numercial Analysics [M]. Beijing: China Machine Press, 2009. 216-218.
[22] [22] S Qian, P Z Takacs. Equal optical path beam splitters by use of amplitude-splitting and wavefront-splitting methods for pencil beam interferometer [C]. SPIE, 2004, 5193: 79-88.
Get Citation
Copy Citation Text
Liao Jiasheng, Gong Yan, Zhang Wei, Li Jing, Li Chuncai, Yao Changcheng, Min Lin. Beam Splitter with Two Fresnel Biprisms for Long Trace Profiler[J]. Acta Optica Sinica, 2014, 34(1): 123001
Category: Optical Devices
Received: Jun. 14, 2013
Accepted: --
Published Online: Dec. 25, 2013
The Author Email: Jiasheng Liao (expore07@163.com)