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Microelectronics, Volume. 54, Issue 2, 264(2024)

Corrosion Inhibition Mechanism and Research Progress of Compounding Corrosion Inhibitors in Cu/Co Barrier Layers

LUO Bowen1... GAO Baohong1,2,3, SHI Yuexing4, LI Wenhaoyu1,2,3, HUO Jinxiang1,2,3, and HE Bin1,23 |Show fewer author(s)
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  • 1[in Chinese]
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  • 4[in Chinese]
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    LUO Bowen, GAO Baohong, SHI Yuexing, LI Wenhaoyu, HUO Jinxiang, HE Bin. Corrosion Inhibition Mechanism and Research Progress of Compounding Corrosion Inhibitors in Cu/Co Barrier Layers[J]. Microelectronics, 2024, 54(2): 264

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    Received: Oct. 3, 2023

    Accepted: --

    Published Online: Aug. 21, 2024

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.230374

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology