[1] [1] LUGINBUHL P,RACINE G,LERCH P,et al..Piezoelectric cantilever beams actuated by PZT Sol-Gel films[J].Sensors and Actuators,1996,A53:530-535.

[2] [2] MIYAHARA Y,FUJI T,WATANABE S,et al..PZT cantilever for non-contact atomic force microscopy[J].Applied Surface Science,1999,140:428-431.

[3] [3] MURALT P,KOHLI M,MAEDER T,et al..Fabrication and characterization of PZT thin film vibrators for micromotos[J].Sensors and Actuators,1995,A48:157-165.

[9] [9] CHON H,KIM H G.PT(PbTiO3) buffer layer effects on the electrical properties of Pb(Zr,Ti)O3 thin films[J].Microelectronic Engineering,1995,29:243-246.

[10] [10] VELU G,HACCART T,JABER B,etal..PbTiO3 buffer layer effects on the structural and electrical properties of Pb(Zr,Ti)O3 thin films grown by sputtering on silicon substrates[J].American Vacuum Society,1998,16(4):2442-2447.

[11] [11] KUSHIDA K,UDAYAKUMAR K,KRUPANIDHI S,et al..Origin of orientation in Sol-Gel derived lead titanate films[J].American Ceramic Society,1993,76(5),1345-1348.

[12] [12] CAROTENUTO R,LAMBERTI N,LULA A,et al..A new low voltage piezoelectric micromotor based on stator precessional motion[J].IEEE Transactions on Ultrasonics,Ferroelectrics and Frequency Control,1998,45 (5):1427-1435.