Optics and Precision Engineering, Volume. 15, Issue 9, 1404(2007)
Microforce sensors based on PT/PZT/PT thin films
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Microforce sensors based on PT/PZT/PT thin films[J]. Optics and Precision Engineering, 2007, 15(9): 1404