Acta Optica Sinica, Volume. 4, Issue 2, 149(1984)
Ultraviolet-visible ellipsometric spectra and optical constants of sputtered amorphous silicon
Get Citation
Copy Citation Text
CHEN SHUGUANG, JIANG RENRONG, MO DANG. Ultraviolet-visible ellipsometric spectra and optical constants of sputtered amorphous silicon[J]. Acta Optica Sinica, 1984, 4(2): 149