Acta Optica Sinica, Volume. 4, Issue 2, 149(1984)
Ultraviolet-visible ellipsometric spectra and optical constants of sputtered amorphous silicon
The optical properties of sputtered amorphous silicon have been measured with an ultraviolet-visible spectroscopic ellipsometer constructed by the authors. The ultraviolet-visible n~? and k~? relations for the amorphous silicon sputtered in various H partial pressures have been obtained and discussed.
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CHEN SHUGUANG, JIANG RENRONG, MO DANG. Ultraviolet-visible ellipsometric spectra and optical constants of sputtered amorphous silicon[J]. Acta Optica Sinica, 1984, 4(2): 149