Acta Optica Sinica, Volume. 4, Issue 2, 149(1984)

Ultraviolet-visible ellipsometric spectra and optical constants of sputtered amorphous silicon

CHEN SHUGUANG, JIANG RENRONG, and MO DANG
Author Affiliations
  • [in Chinese]
  • show less

    The optical properties of sputtered amorphous silicon have been measured with an ultraviolet-visible spectroscopic ellipsometer constructed by the authors. The ultraviolet-visible n~? and k~? relations for the amorphous silicon sputtered in various H partial pressures have been obtained and discussed.

    Tools

    Get Citation

    Copy Citation Text

    CHEN SHUGUANG, JIANG RENRONG, MO DANG. Ultraviolet-visible ellipsometric spectra and optical constants of sputtered amorphous silicon[J]. Acta Optica Sinica, 1984, 4(2): 149

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Mar. 9, 1983

    Accepted: --

    Published Online: Sep. 15, 2011

    The Author Email:

    DOI:

    Topics