Optics and Precision Engineering, Volume. 32, Issue 20, 3026(2024)

Absolute planar two-dimensional time-grating displacement sensor with multi-frequency magnetic field coupling

Jisen YANG1...2,3,*, Fu XIU1,3, Jing ZHANG4, Junsong YUAN1,3, and Xiaolong ZHANG13 |Show fewer author(s)
Author Affiliations
  • 1Engineering Research Center of Mechanical Testing Technology and Equipment, Ministry of Education, Chongqing University of Technology, Chongqing400054, China
  • 2Key Laboratory of Advanced Manufacturing Technology for Automobile Parts, Ministry of Education, Chongqing400054, China
  • 3Chongqing Key Laboratory of Time-Grating Sensing and Advanced Testing Technology, Chongqing400054, China
  • 4School of Electrical and Electronic Engineering, Chongqing University of Technology, Chongqing0005, China
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    Figures & Tables(30)
    Mathematical model of magnetic field distribution of single pitch rectangular coil
    Numerical simulation of magnetic field distribution of a single pitch rectangular coil
    Magnetic field distribution of different coil widths
    Schematic diagram of incremental two-dimensional time-gating sensor
    Schematic diagram of winding and arrangement of incremental two-dimensional time-grating coils
    Numerical simulation diagram of magnetic field distribution of double pitch double excitation coil
    Incremental two-dimensional time-graing signal processing block diagram
    Absolute two-dimensional time-grating displacement sensor measurement model
    Schematic diagram of winding and arrangement of absolute two-dimensional time-grating coils
    Two-dimensional time-sharing incentive drive scheme flow chart
    Two-dimensional absolute position solution block diagram
    Flow chart of solving the absolute position of the two dimensional time-grating for the polar prime
    Induced traveling wave signal and counting diagram
    Induction travelling wave signal graph
    Simulation error curves for different installation gaps
    Simulation error spectra of different installation gaps
    Absolute position solution simulation traveling wave signal diagram
    Simulation validation of two-dimension absolute position solving scheme
    Sensor prototyping
    Two-dimensional precision experimental platform
    Sensor raw amplified sensing signal
    Experimental accuracy in polar
    Two different installation states
    Sensor stability testing
    Raw error curve in the effective measuring range
    [in Chinese]
    • Table 1. Precision counter polar meter

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      Table 1. Precision counter polar meter

      X/Yx2/y2X/YQx/Qy
      0*L/N0[0*L/(M*N)-δ,0*L/(M*N)+δ]0
      1*L/N0[5*L/(M*N)-δ,5*L/(M*N)+δ]1
      2*L/N0[3*L/(M*N)-δ,3*L/(M*N)+δ]2
      3*L/N0[1*L/(M*N)-δ,1*L/(M*N)+δ]3
      4*L/N0[6*L/(M*N)-δ,6*L/(M*N)+δ]4
      5*L/N0[4*L/(M*N)-δ,4*L/(M*N)+δ]5
      6*L/N0[2*L/(M*N)-δ,2*L/(M*N)+δ]6
    • Table 2. Sensor simulation parameter setting

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      Table 2. Sensor simulation parameter setting

      仿真参数参数值
      激励电流幅值/A0.1
      X激励电流频率/kHz500
      Y激励电流频率/MHz1
      粗机激励线圈节距W1/mm10.5
      精机激励线圈节距W2/mm8
      激励线圈高度/mm60
      激励线圈直径/mm0.1
      激励线圈阻抗/MΩ1
      激励线圈匝数/匝1
      粗机感应线圈宽度/mm21
      粗机感应线圈高度/mm10.4
      精机感应线圈宽度/mm16
      精机感应线圈高度/mm7.9
      感应线圈直径/mm0.1
      感应线圈阻抗/MΩ1
      感应线圈匝数/匝1
      基体材料Steel_1008
      线圈材料Copper
      安装间隙/mm0.8
      粗测通道仿真距离/mm10.5
      粗测通道仿真步长/mm0.25
      精测通道仿真距离/mm8
      精测通道仿真步长/mm0.2
      X方向仿真时长/μs2
      X方向仿真时间步长/μs0.05
      Y方向仿真时长/μs1
      Y方向仿真时间步长/μs0.025
      运动方向y=x
    • Table 3. Analysis and summary of simulation error of precision measurement channel under different installation gap

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      Table 3. Analysis and summary of simulation error of precision measurement channel under different installation gap

      安装间隙/mm精测通道误差峰峰值主要误差频次
      24
      0.6X方向幅值/μm34.5416.230.62
      Y方向幅值/μm35.1216.540.40
      0.7X方向幅值/μm35.7216.490.73
      Y方向幅值/μm35.0016.700.51
      0.8X方向幅值/μm33.1215.390.61
      Y方向幅值/μm33.9716.640.72
      0.9X方向幅值/μm33.0816.180.55
      Y方向幅值/μm35.0016.330.90
      1.0X方向幅值/μm36.6517.820.47
      Y方向幅值/μm34.4816.710.41
      1.5X方向幅值/μm37.1815.590.39
      Y方向幅值/μm36.0115.740.96
      2.0X方向幅值/μm39.8715.900.63
      Y方向幅值/μm32.7815.061.22
    • Table 3. Analysis and summary of simulation error of precision measurement channel under different installation gap

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      Table 3. Analysis and summary of simulation error of precision measurement channel under different installation gap

      安装间隙/mm精测通道误差峰峰值主要误差频次
      24
      0.1X方向幅值/μm32.4715.910.40
      Y方向幅值/μm34.3016.540.12
      0.2X方向幅值/μm33.0715.870.12
      Y方向幅值/μm33.9216.910.07
      0.3X方向幅值/μm34.4115.260.68
      Y方向幅值/μm32.9016.620.08
      0.4X方向幅值/μm32.9716.080.10
      Y方向幅值/μm35.5316.540.46
      0.5X方向幅值/μm35.0316.090.34
      Y方向幅值/μm34.0116.800.07
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    Jisen YANG, Fu XIU, Jing ZHANG, Junsong YUAN, Xiaolong ZHANG. Absolute planar two-dimensional time-grating displacement sensor with multi-frequency magnetic field coupling[J]. Optics and Precision Engineering, 2024, 32(20): 3026

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    Paper Information

    Category:

    Received: Jul. 22, 2024

    Accepted: --

    Published Online: Jan. 10, 2025

    The Author Email: YANG Jisen (yangjs@cqut.edu.cn)

    DOI:10.37188/OPE.20243220.3026

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