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Acta Photonica Sinica, Volume. 48, Issue 4, 423001(2019)

Chip of Phase Control Arrays Based on Silica on Silicon

YAN Yue-wu1...2,*, AN Jun-ming1,2, ZHANG Jia-shun1, WANG Liang-liang1, LI Jian-guang1, WANG Hong-jie1, WU Yuan-da1,2, YIN Xiao-jie1 and WANG Yue1 |Show fewer author(s)
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    YAN Yue-wu, AN Jun-ming, ZHANG Jia-shun, WANG Liang-liang, LI Jian-guang, WANG Hong-jie, WU Yuan-da, YIN Xiao-jie, WANG Yue. Chip of Phase Control Arrays Based on Silica on Silicon[J]. Acta Photonica Sinica, 2019, 48(4): 423001

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    Paper Information

    Received: Oct. 8, 2018

    Accepted: --

    Published Online: Apr. 28, 2019

    The Author Email: Yue-wu YAN (yanyuewu@semi.ac.cn)

    DOI:10.3788/gzxb20194804.0423001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology