Fig. 1. Optical apparatus for simultaneously inspecting top and side surfaces defects of TEC components with polarization confocal imaging

Fig. 2. Illustration of prism relay system for the apparatus for inspecting adjacent surfaces defects of TEC components with equal-optical-path polarization imaging

Fig. 3. Illustration of configuration of CMOS polarization imaging sensor (polarization camera)

Fig. 4. Defect inspection of top and side surfaces of TEC components based on equal-optical-path polarization imaging

Fig. 5. Defect inspection of top and side surfaces of TEC components with quasi-confocal imaging (δ=1.62 mm)

Fig. 6. Defect inspection of top and side surfaces of TEC components when the top surface is focused (δ=1.62 mm)