Acta Optica Sinica, Volume. 32, Issue 6, 631001(2012)
Technique to Minimize the Characterization Deviations of Optical Parameters of Thin Films Caused by Ellipsometric Measurement Systematic Errors
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Wu Suyong, Long Xingwu, Yang Kaiyong. Technique to Minimize the Characterization Deviations of Optical Parameters of Thin Films Caused by Ellipsometric Measurement Systematic Errors[J]. Acta Optica Sinica, 2012, 32(6): 631001
Paper Information
Category: Thin Films
Received: Nov. 11, 2011
Accepted: --
Published Online: May. 16, 2012
The Author Email: Suyong Wu (sywu2001@163.com)
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