Piezoelectrics & Acoustooptics, Volume. 42, Issue 3, 303(2020)

Preparation and Characterization of Bragg Reflective Wide-band Thin Film Bulk Acoustic Filters

WANG Xiaoxue... SHUAI Yao, TIAN Benlang, BAI Xiaoyuan, LYU Lu, JIAN Ke, LUO Wenbo, WU Chuangui and ZHANG Wanli |Show fewer author(s)
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    References(9)

    [1] [1] ROESSLER A.Impact of spectrum sharing on 4G and 5G standards a review of how coexistance and spectrum sharing is shaping 3GPP standards[C]//Washington,DC,USA:2017 IEEE International Symposium on Electromagnetic Compatibility & Signal/Power Integrity (EMCSI),IEEE,2017:704-707.

    [2] [2] PARK J,JEONG M,HUSSAIN N,et al.A low-profile high-gain filtering antenna for fifth generation systems based on nonuniform metasurface[J].Microwave and Optical Technology Letters,2019,61(11):2513-2519.

    [3] [3] LIU L,FU Q,LIANG F,et al.Dual-band filter based on air-filled SIW cavity for 5G application[J].Microwave and Optical Technology Letters,2019,61(11):2599-2606.

    [4] [4] CLEMENT M,DELICADO A,OLIVARES J,et al.Frequency response of AlN-based solidly mounted resonators under mechanical stress[J].Sensors and Actuators A:Physical,2017,258:39-43.

    [5] [5] YANG Y,LU R,MANZANEQUE T,et al.1.7 GHz Y-cut lithium niobate MEMS resonators with FoM of 336 and f·Q of 9.15×1012[C]//Philadelphia,PA:2018 IEEE/MTT-S International Microwave Symposium-IMS,IEEE,2018:563-566.

    [6] [6] BARON T,LEBRASSEUR E,BASSIGNOT F,et al.Wideband lithium niobate FBAR filters[J].International Journal of Microwave Science and Technology,2013,2013:1-6.

    [7] [7] OSUGI Y,YOSHINO T,SUZUKI K,et al.Single crystal FBAR with LiNbO3 and LiTaO3 piezoelectric substance layers[C]//Honolulu,HI,USA:2007 IEEE/MTT-S International Microwave Symposium,IEEE,2007:873-876.

    [8] [8] RABIEI P,GUNTER P.Sub-micron thin films of lithium niobate single crystals prepared by crystal ion slicing and wafer bonding[C]//Baltimore,MD,USA:Conference on Lasers and Electro-Optics,2005,IEEE,2005:235-237.

    [9] [9] MARTIN E,LARATO C,CLMENT A,et al.Detection of delaminations in sub-wavelength thick multi-layered packages from the local temporal coherence of ultrasonic signals[J].NDT & E International,2008,41(4):280-291.

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    WANG Xiaoxue, SHUAI Yao, TIAN Benlang, BAI Xiaoyuan, LYU Lu, JIAN Ke, LUO Wenbo, WU Chuangui, ZHANG Wanli. Preparation and Characterization of Bragg Reflective Wide-band Thin Film Bulk Acoustic Filters[J]. Piezoelectrics & Acoustooptics, 2020, 42(3): 303

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    Paper Information

    Received: Dec. 26, 2019

    Accepted: --

    Published Online: Apr. 21, 2022

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2020.03.005

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