Piezoelectrics & Acoustooptics, Volume. 42, Issue 3, 303(2020)

Preparation and Characterization of Bragg Reflective Wide-band Thin Film Bulk Acoustic Filters

WANG Xiaoxue... SHUAI Yao, TIAN Benlang, BAI Xiaoyuan, LYU Lu, JIAN Ke, LUO Wenbo, WU Chuangui and ZHANG Wanli |Show fewer author(s)
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    The design and fabrication of a novel Bragg reflection-type thin film bulk acoustic wave (BAW) filter is investigated in this work. In BAW devices, Y43° lithium niobate single crystal thin film (Y43°-LN) with high electromechanical coupling coefficient was selected as the piezoelectric material and the Benzocyclobutene (BCB) was used as wafer bonding layer. The Y43°-LN monocrystalline thin film with submicron thickness was transferred to the substrate with Bragg reflection layer by the crystal-ion-slicing method. As both the bonding layer and the first low impedance layer of Bragg reflector, BCB is used to prepare the single crystal BAW filter. The third-order BAW filter wwith the central frequency of 2.93 GHz, absolute bandwidth and fractional bandwidth of 247 MHz and 8.4% respectively is designed and fabricated. The results indicate that the high electromechanical coupling coefficient LN single crystal thin film prepared by film transfer technology can realize the preparation of large-bandwidth BAW filter.

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    WANG Xiaoxue, SHUAI Yao, TIAN Benlang, BAI Xiaoyuan, LYU Lu, JIAN Ke, LUO Wenbo, WU Chuangui, ZHANG Wanli. Preparation and Characterization of Bragg Reflective Wide-band Thin Film Bulk Acoustic Filters[J]. Piezoelectrics & Acoustooptics, 2020, 42(3): 303

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    Paper Information

    Received: Dec. 26, 2019

    Accepted: --

    Published Online: Apr. 21, 2022

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2020.03.005

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