Optics and Precision Engineering, Volume. 19, Issue 3, 573(2011)

Calibration of error due to mechanical swing of focusing setup in alignment system

WANG Quan-dai1...2,*, LI Yan1 and XIAO Ji-ming1 |Show fewer author(s)
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    WANG Quan-dai, LI Yan, XIAO Ji-ming. Calibration of error due to mechanical swing of focusing setup in alignment system[J]. Optics and Precision Engineering, 2011, 19(3): 573

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    Paper Information

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    Received: May. 30, 2010

    Accepted: --

    Published Online: Mar. 30, 2011

    The Author Email: Quan-dai WANG (quandaiw@163.com)

    DOI:

    CSTR:32186.14.

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