Optics and Precision Engineering, Volume. 19, Issue 3, 573(2011)
Calibration of error due to mechanical swing of focusing setup in alignment system
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WANG Quan-dai, LI Yan, XIAO Ji-ming. Calibration of error due to mechanical swing of focusing setup in alignment system[J]. Optics and Precision Engineering, 2011, 19(3): 573
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Received: May. 30, 2010
Accepted: --
Published Online: Mar. 30, 2011
The Author Email: Quan-dai WANG (quandaiw@163.com)
CSTR:32186.14.
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