Opto-Electronic Engineering, Volume. 32, Issue 12, 25(2005)

Finite element simulation of the structure and physical characteristics for an uncooled infrared focal plane array

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    References(4)

    [2] [2] WANG Wei-bing,CHEN Da-peng,YE Tian-chun,et al.An uncooled infrared imaging system based on novel stencil bi-material cantilever structure[A].Proc.Asia-Pacific Conference of Transducers and Micro-Nano Technology[C].Sapporo,Japan:2004,3(2):794-798.

    [3] [3] ZHAO Yang.Optomechanical uncooled infrared imaging system[D].Berkeley,USA:Dissertation of UC,Berkeley,2002.

    [4] [4] ZHAO Y,MAO M,HOROWITZ R,et al.Optomechanical uncooled infrared imaging system:design,microfabrication,and performance[J].J.of MEMS,2002,11(2):136-146.

    [5] [5] Biao LI.Design and simulation of an uncooled double-cantilever microbolometer with the potential for~mK NETD[J].Sensors and Actuators A,2004,112:351-359.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Finite element simulation of the structure and physical characteristics for an uncooled infrared focal plane array[J]. Opto-Electronic Engineering, 2005, 32(12): 25

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    Paper Information

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    Received: Dec. 30, 2004

    Accepted: --

    Published Online: Nov. 14, 2007

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