[1] [1] Zhou Yuan, Li Yanqiu, Liu Guangcan. Study on pellicle optimization and polarization aberration induced by pellicle in hyper numerical aperture lithography［J］. Chinese J. Lasers, 2011, 38(4): 0407001

[2] [2] N. Yamamoto, J. Kye, H. J. Levinson. Polarization aberration analysis using Pauli-Zernike representation［C］. SPIE, 2007, 6520: 65200Y

[3] [3] Pan Baozhu, Cheng Haobo, Wen Yongfu et al.. Establishment of an equation of schmidt corrector plate with large aperture based on wavefront aberration functions ［J］. Acta Optica Sinica, 2012, 32(2): 0222001

[4] [4] Lu Jinjun, Sun Xueping, Li Xiangyang. The characters of Schmidt prism under the effect of polarization and diffraction of ridge［J］. Acta Photonica Sinica, 2012, 41(8): 949～955

[5] [5] J. Liu, R. M. A. Azzam. Polarization properties of corner-cube retroreflectors: theory and experiment［J］. Appl. Opt., 1997, 36(7): 1553～1559

[6] [6] Nie Hui, Weng Xingtao, Li Song. The far-field diffractive characteristics of cube-corner prism［J］. Acta Optica Sinica, 2003, 23(12): 1470～1474

[7] [7] Zhu Qingchun. Introduction to Matrix Optics［M］. Shanghai: Shanghai Science and Technology Documentation Press, 1991. 208～217