Acta Optica Sinica, Volume. 28, Issue 7, 1225(2008)
Optimized Design of Transmission Grating Used for 13.4 nm Soft X-Ray Interference Lithography
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Zhu Weizhong, Wu Yanqing, Chen Min, Wang Naxiu, Tai Renzhong, Xu Hongjie. Optimized Design of Transmission Grating Used for 13.4 nm Soft X-Ray Interference Lithography[J]. Acta Optica Sinica, 2008, 28(7): 1225
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