Effects of Position Sensitive Detector on Laser Tracing Measurement System

Chen Hongfang; Tang Liang; Zhang Shuang; Sun Ruoshui; Sun Yanqiang

doi:10.3788/CJL202047.1104001

Chinese Journal of Lasers, Volume. 47, Issue 11, 1104001(2020)

Effects of Position Sensitive Detector on Laser Tracing Measurement System

Chen Hongfang^*, Tang Liang, Zhang Shuang, Sun Ruoshui, and Sun Yanqiang

Beijing Engineering Research Center of Precision Measurement Technology and Instruments, Beijing University of Technology, Beijing 100124, China

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Abstract Get PDF(in Chinese)

Figures & Tables(14)

Fig. 1. Measuring principle of PSD

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Fig. 2. Principle of laser tracing measurement system

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Fig. 3. Schematic diagram of the servo control system of the laser tracing measurements system

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Fig. 4. Simulation model of the precision servo control system of the laser tracing measurement system

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Fig. 5. Step response curves of PSD under different α_p

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Fig. 6. Tracing error curves of the PSD under different α_p

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Fig. 7. Step response curves of cat's eye retroreflector at different moving speeds

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Fig. 8. Tracing error curves of cat's eye retroreflector at different moving speeds

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Fig. 9. Experimental device for measuring output voltage of photoelectric conversion circuit

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Fig. 10. Experimental setup for measuring response time of photoelectric conversion circuit

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Fig. 11. Response time of PSD photoelectric conversion circuit under different α_p. (a) α_p=500 m/V; (b) α_p=1000 m/V; (c) α_p=1500 m/V; (d) α_p=2000 m/V

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Table 1. Motor parameters of the simulation model
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Table 1. Motor parameters of the simulation model
Motor Parameter
Rated speed n /(r·min ^-1) 60
Phase inductance L /mH 1.8
Stator resistor R /Ω 1.4
Rated torque T_L /(N·m) 28
Number of pole pairs p 4
Moment of inertia J /(kg·m²) 0.215

Table 2. Electrical and optical characteristics

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Table 2. Electrical and optical characteristics

Parameter	Value
Large photosensitive area /(mm×mm)	9×9
Spectral response range /nm	320--1100
Peak sensitivity wavelength /nm	960
Photosensitivity /(A·W^-1)	0.38
Position detection error /μm	±150
Saturation photocurrent /μA	500
Dark current /nA	1--50
Rise time /μs	2
Terminal capacitance /pF	500--1000
Position resolution /μm	1.5

Table 3. Errors of output voltage values of PSD photoelectric conversion circuit under different α_p
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Table 3. Errors of output voltage values of PSD photoelectric conversion circuit under different α_p
α_p /(m·V^-1) Δu_x /mV Δu_y /mV
500 0.061 0.639
1000 0.129 0.266
1500 0.214 0.639
2000 0.363 1.508

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Chen Hongfang, Tang Liang, Zhang Shuang, Sun Ruoshui, Sun Yanqiang. Effects of Position Sensitive Detector on Laser Tracing Measurement System[J]. Chinese Journal of Lasers, 2020, 47(11): 1104001

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Paper Information

Category: Measurement and metrology

Received: Apr. 13, 2020

Accepted: --

Published Online: Oct. 20, 2020

The Author Email: Hongfang Chen (chf0302@126.com)

DOI:10.3788/CJL202047.1104001

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Motor parameters of the simulation model

Table 1. Motor parameters of the simulation model

Table 2. Electrical and optical characteristics

Table 2. Electrical and optical characteristics

Table 3. Errors of output voltage values of PSD photoelectric conversion circuit under different αp

Table 3. Errors of output voltage values of PSD photoelectric conversion circuit under different αp

Table 3. Errors of output voltage values of PSD photoelectric conversion circuit under different α_p

Table 3. Errors of output voltage values of PSD photoelectric conversion circuit under different α_p