Fig. 1. Surface topography of a CVD single crystal diamond

Fig. 2. Schematic of femtosecond laser processing of diamond

Fig. 3. SEM images of the micro-cracks and ablation debris at the diamond microgrooves in terms of laser fluence

Fig. 4. SEM images of the diamond microgrooves in terms of laser fluence

Fig. 5. SEM images of diamond microgrooves in terms of scanning speed

Fig. 6. SEM images of diamond microgrooves in terms of scanning times

Fig. 7. Variation of the width of diamond microgrooves with laser pulse energy and linear fitting of square of microgroove width versus logarithm of the laser pulse energy

Fig. 8. Three-dimensional morphologies and the corresponding cross-sectional curves of femtosecond laser-processed diamond microgrooves

Fig. 9. Variation of ablation rate and material removal rate with laser fluence for femtosecond laser processing of diamond

Fig. 10. Raman spectra analysis of diamond microgrooves processed by femtosecond laser

Fig. 11. Effect of different laser fluences on Raman spectra in the central region of diamond microgrooves

Fig. 12. Finite element simulation model of femtosecond laser processing of diamond and Temperature versus time curve at the center of the femtosecond laser

Fig. 13. Temperature distribution contour of femtosecond laser processing of diamond at the peak power moment

Fig. 14. Temperature profiles along X direction and Z direction in the diamond irradiated zone at the peak power moment