Optics and Precision Engineering, Volume. 31, Issue 21, 3096(2023)

Progress in spectral imaging technology of digital micromirror devices

Yingchao SHI1...2, Luming ZHANG1,2, Fei CHEN1,2, Weizheng YUAN1,2, and Yiting YU12,* |Show fewer author(s)
Author Affiliations
  • 1College of Mechanical and Electrical Engineering, Ningbo Institute of Northwestern Polytechnical University, Xi'an70072, China
  • 2Key Laboratory of Micro/Nano Systems for Aerospace (Ministry of Education), Key Laboratory of Micro and Nano-Electro-Mechanical Systems of Shaanxi Province, Northwestern Polytechnical University, Xi'an71007, China
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    In recent years, digital micromirror device (DMD), as a flexible, programmable, and independently addressable spatial light modulation device, has been widely used in maskless lithography, beam shaping, holographic imaging, confocal measurement, and other fields. The flexible modulation mode also gives DMD unique advantages in spectral imaging. It can flexibly modulate the imaging field of view, replacing the traditional mechanical mask and scanning structure. In this study, DMD's research progress and application in spectral imaging in recent years was reviewed. The basic structure and working principle of the optical system of the aperture-coded and push-broom spectral imaging system based on DMD were discussed in detail and the development of a spectral imaging system based on DMD from Hadamard transform spectral imaging to push-broom spectral imaging was summarized. The relevant research work to overcome the DMD's diffraction owing to the micro-mirror and inclination of the image plane was introduced. Finally, The unique advantages of spectral imaging technology based on DMD was summarized and the future development direction and application prospect of spectral imaging technology based on DMD was discussed .

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    Yingchao SHI, Luming ZHANG, Fei CHEN, Weizheng YUAN, Yiting YU. Progress in spectral imaging technology of digital micromirror devices[J]. Optics and Precision Engineering, 2023, 31(21): 3096

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    Paper Information

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    Received: May. 10, 2023

    Accepted: --

    Published Online: Jan. 5, 2024

    The Author Email: YU Yiting (yyt@nwpu.edu.cn)

    DOI:10.37188/OPE.20233121.3096

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