Characteristic measurement of PZT piezoelectric thick-film by screen printing with compatible process with MEMS

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Optics and Precision Engineering, Volume. 12, Issue z1, 72(2004)

[in Chinese]... [in Chinese], [in Chinese] and [in Chinese] |Show fewer author(s)

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References(1)

[1] [1] BEEBY S P. BLACKBURN N M. white,processing of PZT piezoelectric thick film on silicon for microelectromechancial systems[J]. Micromechmicroeng, 1999,9:218-229.

CLP Journals

[1] WANG Wei, TIAN Li, LIU Xiao-wei, REN Ming-yuan, ZHANG Ying. PZT piezoelectric function structure on silicon substrate[J]. Optics and Precision Engineering, 2009, 17(3): 583

[2] Zhang Xuping, Wang Jiaqi, Zhang Yixin, Wang Shun, Xie Fei. Large-Scale Three-Dimensional Stereo Vision Geometric Measurement System[J]. Acta Optica Sinica, 2012, 32(3): 315002

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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Characteristic measurement of PZT piezoelectric thick-film by screen printing with compatible process with MEMS[J]. Optics and Precision Engineering, 2004, 12(z1): 72

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