Optics and Precision Engineering, Volume. 12, Issue z1, 72(2004)
Characteristic measurement of PZT piezoelectric thick-film by screen printing with compatible process with MEMS
Keywords
Tools
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Characteristic measurement of PZT piezoelectric thick-film by screen printing with compatible process with MEMS[J]. Optics and Precision Engineering, 2004, 12(z1): 72
Paper Information
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20