Optics and Precision Engineering, Volume. 12, Issue z1, 49(2004)

Micromechanical high-Q resonator based on hybrid cavity

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    References(5)

    [1] [1] KWEON Y. RF-MEMS and applications[J]. Microwave Journal, 2002, (3): 4-48.

    [4] [4] Blondy P, Brown A, Cros D, et al. Low-loss micromachined filters for mm-wave telecommunication systems[J].IEEE IMS Digest, 1998: 1181-1184.

    [5] [5] PAPAPOLYMEROU J, CHENG J, EAST J, et al. A micromachined high-Q X-band resonator[J]. IEEE Microw. & Guided Wave Letters, 1997,7(6): 168-170.

    [6] [6] GUILLON B. Design and realization of high-Q mm-wave structures through micromachining techniques[J]. IEEE IMS Digest, 1999: 1519-1522.

    [9] [9] SCHNIEDER F, HEINRICH W. Model of thin-film microstrip line for circuit design[J]. IEEE Trans. Microwave Theory Tech., 2001, 49(1): 104-110.

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    [in Chinese], [in Chinese], [in Chinese]. Micromechanical high-Q resonator based on hybrid cavity[J]. Optics and Precision Engineering, 2004, 12(z1): 49

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    Paper Information

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    Received: Mar. 22, 2004

    Accepted: --

    Published Online: Nov. 3, 2006

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