Chinese Optics Letters, Volume. 1, Issue 9, 09529(2003)
1.55-μm Si-based MOEMS optical tunable filter
[1] [1] D. Hohlfeld, M. Epmeier, and M. Zappe, Sensors and Actuators A 93, 103 (2003).
[2] [2] P. Tayebati, P. Wang, and M. Azimi, Electron. Lett. 34, 1967 (1998).
[3] [3] F. Sugihwo, M. C. Larson, and J. S. Harris, J. Micro- Electro-Mechanical Systems 7, 48 (1998).
[4] [4] C. J. Chang-Hasnain, IEEE J. Selected Topics in Quantum Electron. 6, 978 (2000).
[5] [5] A. T. T. D. Tran, Y. H. Lo, Z. H. Zhu, D. Haronian, and E. Mozdy, IEEE Photon. Technol. Lett. 8, 393 (1996).
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Yuhua Zuo, Changjun Huang, Buwen Cheng, Xiao Cai, Rongwei Mao, Chuanbo Li, Liping Luo, Junhua Gao, Yunxia Bai, Lei Jiang, Chaohua Ma, Jialian Zhu, Liangchen Wang, Jinzhong Yu, Qiming Wang. 1.55-μm Si-based MOEMS optical tunable filter[J]. Chinese Optics Letters, 2003, 1(9): 09529