Infrared and Laser Engineering, Volume. 51, Issue 9, 20210964(2022)

Design and fabrication of short and middle wavelength infrared dual band-pass filter at cryogenic temperature

Sheng Zhou1,3, Dingquan Liu1,2,3、*, Kaixuan Wang1, Yaopeng Li1, Jinchao Hu1, Shuguang Wang1, and Haoxiang Zhu1
Author Affiliations
  • 1Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
  • 2School of Physical Science and Technology, ShanghaiTech University, Shanghai 200031, China
  • 3University of Chinese Academy of Sciences, Beijing 100049, China
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    Dual band-pass filter can simultaneously form two spectral channels to transmit at any position of the element, so as to realize simultaneous detection of dual spectral channels. In this paper, an infrared dual band-pass filter used at 100 K temperature was developed. Sapphire (Al2O3) was used as substrate, and Ge and SiO were used as high (H) and low (L) refractive index thin films respectively. An infrared dual band-pass filter combined with a shorter wavelength channel (2.60-2.85 μm) and a longer wavelength channel (4.10-4.40 μm) was designed and fabricated. Based on Fabre-Perot (F-P) filter structure, Ge and SiO thin films were deposited by electron beam evaporation and resistance thermal evaporation on the two sides of the substrate. At the working temperature (100 K), the filter transmittance of shorter channel is 91.2%, and the top ripple amplitude is 2.1%; the average transmittance of longer channel is 87.7%, and the top ripple amplitude is 3.8%. Between the two channels (wavelength 3.00-3.95 μm), the cut-off depth is less than 0.1%. The optical performance of the infrared dual band-pass filter can meet the spectral requirements and contribute to more accurate infrared remote sensing and detection.

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    Sheng Zhou, Dingquan Liu, Kaixuan Wang, Yaopeng Li, Jinchao Hu, Shuguang Wang, Haoxiang Zhu. Design and fabrication of short and middle wavelength infrared dual band-pass filter at cryogenic temperature[J]. Infrared and Laser Engineering, 2022, 51(9): 20210964

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    Paper Information

    Category: Infrared technology and application

    Received: Dec. 15, 2021

    Accepted: --

    Published Online: Jan. 6, 2023

    The Author Email:

    DOI:10.3788/IRLA20210964

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