Acta Photonica Sinica, Volume. 50, Issue 7, 161(2021)
Micro-angle Measurement Method and Its Accuracy Evaluation Based on Fabry-Perot Etalon
Fig. 2. Basic process of lens focal length and center micro-displacement measurement
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Yuan LIU, Xiaoyan SHEN, Shinan ZHOU, Xubo GUO, Jing YU, Dongsheng LI, Xuhui LAN. Micro-angle Measurement Method and Its Accuracy Evaluation Based on Fabry-Perot Etalon[J]. Acta Photonica Sinica, 2021, 50(7): 161
Category: Instrumentation, Measurement and Metrology
Received: Nov. 17, 2020
Accepted: Jan. 11, 2021
Published Online: Sep. 1, 2021
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