Fig. 1. Schematic diagram and photograph of AlGaN-based MSM photodetectors

Fig. 2. Typical 10 μm×10 μm AFM images of AlGaN surfaces before and after modification with Octadecanethiol

Fig. 3. XRD of AlGaN without surface modification and XPS spectrum of AlGaN with surface modification

Fig. 4. Current-voltage response characteristics of AlGaN solar-blind MSM PD before and after ODM modification

Fig. 5. Spectral response characteristics of AlGaN solar-blind MSM PD before and after modification with ODM