Fig. 1. System of surface figure test system

Fig. 2. Layout of optical system

Fig. 3. Layout of system

Fig. 4. Flow chart of integrated optical-mechanical-thermal analysis

Fig. 5. Finite element model of system

Fig. 6. Displacement nephogram of system

Fig. 7. Wavefront aberration at different temperatures

Fig. 8. MTF curve of system at different temperatures

Fig. 9. MTF curve of system at 20°

Fig. 10. Curve of system aberration RMS with temperature

Fig. 11. Flow chart of system installation

Fig. 12. Picture of surface figure test system of FSM

Fig. 13. Curve of RMS with time

Fig. 14. Wave aberration measured by wavefront sensor