Infrared and Laser Engineering, Volume. 51, Issue 5, 20210514(2022)

Design of large aperture fast steering mirror surface figure test system

Xin Liu1... Zhongming Yang1, Zhaojun Liu1 and Jihong Wang2 |Show fewer author(s)
Author Affiliations
  • 1School of Information Science and Engineering, Shandong University, Qingdao 266237, China
  • 2The Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
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    The large aperture fast steering mirror(FSM) are often used in the fields of space optical communications and laser weapons. The large aperture fast steering mirror surface figure test system with an effective aperture of 400 mm has a working wavelength of 633 nm. The system is mainly composed of an off-axis beam expanding system and a focal plane system to achieve real-time detection of the mirror surface figure error when the large aperture FSM is working. In this paper, the design parameters of the optical system and the selection of optical element parameters were described. The optical system was designed and simulated, and the effect of temperature variation on the optical system was obtained based on the integrated optical-mechanical-thermal analysis. The test results show that the large aperture fast steering mirror surface figure test system can achieve real-time recording and high precision measurement, meanwhile, the system has stability in a working environment with temperature changes. The stability of the surface figure test system is 0.048λ (RMS, λ=633 nm).

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    Xin Liu, Zhongming Yang, Zhaojun Liu, Jihong Wang. Design of large aperture fast steering mirror surface figure test system[J]. Infrared and Laser Engineering, 2022, 51(5): 20210514

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    Paper Information

    Category: Photoelectric measurement

    Received: Jul. 28, 2021

    Accepted: Nov. 6, 2021

    Published Online: Jun. 14, 2022

    The Author Email:

    DOI:10.3788/IRLA20210514

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