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Spectroscopy and Spectral Analysis, Volume. 39, Issue 2, 377(2019)

A Laser Interferometric Subnano-Scale Micro-Displacement Measurement System Based on Variable Phase Retardation

LIU Tong1...2, ZHANG Liu1, ZHANG Guan-yu1, CHEN Chen1 and ZHONG Zhi-cheng1 |Show fewer author(s)
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    LIU Tong, ZHANG Liu, ZHANG Guan-yu, CHEN Chen, ZHONG Zhi-cheng. A Laser Interferometric Subnano-Scale Micro-Displacement Measurement System Based on Variable Phase Retardation[J]. Spectroscopy and Spectral Analysis, 2019, 39(2): 377

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    Paper Information

    Received: Dec. 15, 2017

    Accepted: --

    Published Online: Mar. 6, 2019

    The Author Email:

    DOI:10.3964/j.issn.1000-0593(2019)02-0377-06

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology