Method of Measuring Grating Constant Based on Moiré Measurement Technology

Weihao Cheng; Yunyun Chen; Chuansen Duan; Tao Liang; Yusong Li

doi:10.3788/LOP56.062001

Laser & Optoelectronics Progress, Volume. 56, Issue 6, 062001(2019)

Method of Measuring Grating Constant Based on Moiré Measurement Technology

Weihao Cheng, Yunyun Chen^*, Chuansen Duan, Tao Liang, and Yusong Li

Jiangsu Key Laboratory for Optoelectronic Detection of Atmosphere and Ocean, School of Physics and Optoelectronic Engineering, Nanjing University of Information Science & Technology, Nanjing, Jiangsu 210044, China

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Figures & Tables(11)

Fig. 1. Experimental setup

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Fig. 2. Moiré fringes under different θ when d'=0.05 mm

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Fig. 3. Moiré fringes under different θ when d'=0.02 mm

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Fig. 4. Binary Moiré fringes when d'=0.05 mm

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Fig. 5. Binary Moiré fringes when d'=0.02 mm

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Fig. 6. Handled Moiré fringe image. (a) Real image; (b) ideal image

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Fig. 7. Relative error. (a) d'=0.05 mm; (b) d'=0.02 mm

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Table 1. Stripe spacing (d'=0.05 mm)
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Table 1. Stripe spacing (d'=0.05 mm)
Angle Level -1spectrum /mm Level 0spectrum /mm Level +1spectrum /mm
10' 18.1992 18.3686 18.4866
20' 8.9286 8.9286 8.9423
30' 6.1431 6.1397 5.9762
40' 4.4497 4.4722 4.4772
50' 3.5678 3.6652 3.6294
60' 3.0095 3.0308 3.0290

Table 2. Stripe spacing (d'=0.02 mm)
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Table 2. Stripe spacing (d'=0.02 mm)
Angle Level -1spectrum /mm Level 0spectrum /mm Level +1spectrum /mm
10' 7.0060 6.6950 6.1732
20' 3.3072 3.3100 3.2362
30' 2.2530 2.2667 2.2595
40' 1.7146 1.7050 1.7058
50' 1.3506 1.3944 1.3712
60' 1.1490 1.1296 1.1011

Table 3. Grating constants d and relative errors (d'=0.05 mm)

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Table 3. Grating constants d and relative errors (d'=0.05 mm)

Angle	Average ofmeasured stripespacing /mm	Calculatedgratingconstant /mm	Relativeerror /%
10'	18.3515	0.0500001596263400	3.20×10^-4
20'	8.9332	0.0500007202410115	1.44×10^-3
30'	6.0863	0.0500014707048332	2.94×10^-3
40'	4.4664	0.0500028818247214	5.76×10^-3
50'	3.6208	0.0500042469724451	8.49×10^-3
60'	3.0231	0.0500059827546186	1.20×10^-2

Table 4. Grating constants d and relative errors (d'=0.02 mm)

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Table 4. Grating constants d and relative errors (d'=0.02 mm)

Angle	Average ofmeasured stripespacing /mm	Calculatedgratingconstant /mm	Relativeerror /%
10'	6.6247	0.02001625724893170.0199839380966274	8.13×10^-2
20'	3.2845	0.02003636244259360.0199644437992279	1.80×10^-1
30'	2.2597	0.02003035779182460.0199712526754583	1.50×10^-1
40'	1.7085	0.02002712088424230.0199756531973852	1.40×10^-1
50'	1.3712	0.02002423143248790.0199800485359379	1.20×10^-1
60'	1.1266	0.02006828869007950.0199382272621740	3.40×10^-1

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Weihao Cheng, Yunyun Chen, Chuansen Duan, Tao Liang, Yusong Li. Method of Measuring Grating Constant Based on Moiré Measurement Technology[J]. Laser & Optoelectronics Progress, 2019, 56(6): 062001

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