Optics and Precision Engineering, Volume. 26, Issue 8, 2030(2018)

On force and deformation of cantilever Y adjustment mechanism of target alignment sensor

ZHANG Ya-nan*... JING Ling-ling, ZHU Han-yu, SHEN Lin-yong and QIAN Jin-wu |Show fewer author(s)
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    ZHANG Ya-nan, JING Ling-ling, ZHU Han-yu, SHEN Lin-yong, QIAN Jin-wu. On force and deformation of cantilever Y adjustment mechanism of target alignment sensor[J]. Optics and Precision Engineering, 2018, 26(8): 2030

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    Paper Information

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    Received: Nov. 23, 2017

    Accepted: --

    Published Online: Oct. 2, 2018

    The Author Email: Ya-nan ZHANG (ynzhang@mail.shu.edu.cn)

    DOI:10.3788/ope.20182608.2030

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