Intrinsic ZnO f ilms fabricated by DC sputtering from oxygen-def icient targets for Cu(In,Ga)Se2 solar cell application

Chongyin Yang; Dongyun Wan; Zhou Wang; Fuqiang Huang

doi:10.3788/col201109.103102

Chinese Optics Letters, Volume. 9, Issue 10, 103102(2011)

Intrinsic ZnO f ilms fabricated by DC sputtering from oxygen-def icient targets for Cu(In,Ga)Se2 solar cell application

Chongyin Yang^1,2,3, Dongyun Wan², Zhou Wang², and Fuqiang Huang²

Author Affiliations

¹Suzhou Institute of Nano-tech and Nano-bionics, Chinese Academy of Sciences, Suzhou 215123, China

²CAS Key Laboratory of Materials for Energy Conversion, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China

³Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

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Chongyin Yang, Dongyun Wan, Zhou Wang, Fuqiang Huang. Intrinsic ZnO f ilms fabricated by DC sputtering from oxygen-def icient targets for Cu(In,Ga)Se2 solar cell application[J]. Chinese Optics Letters, 2011, 9(10): 103102

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Paper Information

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Received: Apr. 15, 2011

Accepted: Apr. 28, 2011

Published Online: Aug. 8, 2011

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DOI:10.3788/col201109.103102

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology