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Spectroscopy and Spectral Analysis, Volume. 29, Issue 3, 698(2009)

Prepareation of Large Area Al-ZnO Thin Film by DC MagnetronSputtering

JIAO Fei*, LIAO Cheng, HAN Jun-feng, and ZHOU Zhen
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    JIAO Fei, LIAO Cheng, HAN Jun-feng, ZHOU Zhen. Prepareation of Large Area Al-ZnO Thin Film by DC MagnetronSputtering[J]. Spectroscopy and Spectral Analysis, 2009, 29(3): 698

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    Paper Information

    Received: Aug. 10, 2007

    Accepted: --

    Published Online: Dec. 15, 2009

    The Author Email: Fei JIAO (FJiao@pku.edu.cn)

    DOI:10.3964/j.issn.1000-0593(2009)03-0698-04

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology