Fig. 1. System layout of point-diffraction interferometer for three-dimensional coordinate positioning

Fig. 2. Mathematical model for three-dimensional coordinate positioning

Fig. 3. Structure diagram of three-dimensional coordinate positioning neural network model

Fig. 4. Change of loss function in training and validation process

Fig. 5. Coordinate measurement error in simulation. Measurement error for the displacements in x, y, z axes (a)-(c)

Fig. 6. Coordinate measurement error in experiment

Fig. 7. Change of phase error with different reconstruction methods in experiment

Fig. 8. Repeatability measurement results in experiment