Acta Photonica Sinica, Volume. 50, Issue 6, 100(2021)
Highly Efficient Fabrication of Superhydrophilic Structures on Silicon Surface by the Interference of Two Femtosecond Laser Beams
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Fig. 1. Experimental setup for the two-beam interference of femtosecond laser
Fig. 2. Micrographs of water droplet （1 μL） on a silicon surface in air
Fig. 3. Scanning electric microscope images of hybrid micro-nanostructures on silicon surface
Fig. 4. Micrographs of water droplet （1 μL） on silicon surface after laser ablation
Fig. 5. The dependences of the contact angle and the surface roughness on the scanning speed
Fig. 7. High resolution X-ray photoelectron spectroscopy of O1s on a silicon surface
Fig. 8. High resolution X-ray photoelectron spectroscopy of C1s on a silicon surface
Table 1. Surface roughness of silicon ablated at different scanning speeds
View tableView in ArticleTable 1. Surface roughness of silicon ablated at different scanning speeds
Scanning speed 5 mm/s 4 mm/s 3 mm/s 2 mm/s Surface roughness 23 nm 62 nm 101 nm 148 nm
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Yanli LI, Xin JIA, Kaiqiang CAO, Fengzhuo ZHANG, Long CHEN, Tianqing JIA. Highly Efficient Fabrication of Superhydrophilic Structures on Silicon Surface by the Interference of Two Femtosecond Laser Beams[J]. Acta Photonica Sinica, 2021, 50(6): 100
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Received: Mar. 19, 2021
Accepted: Apr. 25, 2021
Published Online: Aug. 31, 2021
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