Infrared and Laser Engineering, Volume. 34, Issue 5, 617(2005)

Design and optimization of the XeCl excimer laser's stimuli circuit

[in Chinese]1,2 and [in Chinese]1
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  • 1[in Chinese]
  • 2[in Chinese]
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    References(1)

    [4] [4] Roberts Thomaster L.Experiment studies of a CrF and ArF discharge laser[J].IEEE J,1978,QE-14(12):944-950.

    CLP Journals

    [1] Qin Juanjuan, Shao Jingzhen, Liu Fengjuan, Fang Xiaodong. Crystallization of amorphous Si films by excimer laser annealing[J]. Infrared and Laser Engineering, 2015, 44(3): 959

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    [in Chinese], [in Chinese]. Design and optimization of the XeCl excimer laser's stimuli circuit[J]. Infrared and Laser Engineering, 2005, 34(5): 617

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    Paper Information

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    Received: Jan. 20, 2005

    Accepted: Mar. 10, 2005

    Published Online: May. 25, 2006

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