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Infrared and Laser Engineering, Volume. 50, Issue 3, 20200330(2021)

Research of high-performance uncooled infrared focal plane array detector with common-leg structure

Yaqin Wang... Guangyan Cai, Zhanfeng Ma, Jianfei Gao and Li Huang |Show fewer author(s)
Author Affiliations
  • Wuhan Guide Infrared Co., Ltd., Wuhan 430205, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (12)
    Equations (1)
    References (12)
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    Figures & Tables(12)
    One-layer structure of microbolometer

    Fig. 1. One-layer structure of microbolometer

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    Double-layer structure of microbolometer

    Fig. 2. Double-layer structure of microbolometer

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    Double-layer (umbrella) structure of microbolometer

    Fig. 3. Double-layer (umbrella) structure of microbolometer

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    Plane schematic (a) and 3-D diagram (b) of common-leg structure

    Fig. 4. Plane schematic (a) and 3-D diagram (b) of common-leg structure

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    Layout of common-leg width with 0.35 μm and 0.5 μm

    Fig. 5. Layout of common-leg width with 0.35 μm and 0.5 μm

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    Outline of micro bridge fabrication process

    Fig. 6. Outline of micro bridge fabrication process

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    Components of IRFPA metallic package

    Fig. 7. Components of IRFPA metallic package

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    Map of non_effective pixels

    Fig. 8. Map of non_effective pixels

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    Noise histogram

    Fig. 9. Noise histogram

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    NETD histogram

    Fig. 10. NETD histogram

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    Responsivity histogram

    Fig. 11. Responsivity histogram

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    • Table 1. [in Chinese]

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      Table 1. [in Chinese]

      ArrayPitch/μmFace area/μm2Leg width/μmLeg length/μmNon-uniformity of Res.Package
      Common-leg width=0.5 μm384×288121210.51201.2%metallic
      Common-leg width=0.35 μm384×288121210.351400.6%metallic
      Regular double_layer384×288121210.35700.8%metallic
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    Yaqin Wang, Guangyan Cai, Zhanfeng Ma, Jianfei Gao, Li Huang. Research of high-performance uncooled infrared focal plane array detector with common-leg structure[J]. Infrared and Laser Engineering, 2021, 50(3): 20200330

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    Paper Information

    Category: Infrared technology and application

    Received: Sep. 9, 2020

    Accepted: --

    Published Online: Jul. 15, 2021

    The Author Email:

    DOI:10.3788/IRLA20200330

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology