Acta Optica Sinica, Volume. 32, Issue 9, 922001(2012)

Design and Analysis for the High-Precision Lens Support Structure of Objective Lens for Lithography

Zhao Lei* and Gong Yan
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    References(13)

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    [1] Guo Kang, Gong Yan. Effect of Adjusting Force on Surface Figure of Optical Element in Axial Adjustment Mechanism[J]. Acta Optica Sinica, 2013, 33(11): 1123001

    [2] Liu Yongming, Xie Jun, Li Xiangqin, Liu Zhenyu. Optimization and Figure Analysis of Elastic Thin-Film Liquid Lens[J]. Chinese Journal of Lasers, 2013, 40(12): 1216001

    [3] ZHANG Yun, LIU Lihui, LI Yanqiu, LIU Yan. Effect of Gravity Deformation on the Wavefront of 90 nm Deep Ultraviolet Lithography Projection Optics[J]. Opto-Electronic Engineering, 2015, 42(3): 71

    [4] Zhang Defu, Li Xianling. Effect of Adjusting Force on Surface Figure of Lens in Eccentric Adjusting Mechanism[J]. Chinese Journal of Lasers, 2014, 41(7): 716004

    [5] Sun Zhen, Gong Yan. Design of V-Flexure Axial Adjusting Mechanism of Lithograph Projection Objective[J]. Laser & Optoelectronics Progress, 2013, 50(10): 101101

    [6] Wang Fuguo. Optimization Design of TMT Tertiary Mirror Axial Support[J]. Laser & Optoelectronics Progress, 2013, 50(9): 92202

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    Zhao Lei, Gong Yan. Design and Analysis for the High-Precision Lens Support Structure of Objective Lens for Lithography[J]. Acta Optica Sinica, 2012, 32(9): 922001

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Mar. 29, 2012

    Accepted: --

    Published Online: Jul. 17, 2012

    The Author Email: Lei Zhao (zhaol@sklao.ac.cn)

    DOI:10.3788/aos201232.0922001

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