Infrared and Laser Engineering, Volume. 51, Issue 1, 20210897(2022)
Development and application of short wavelength infrared detectors (Invited)
Figures & Tables(13)
Fig. 2. Traditional flip chip bonding technology via indium (a) and SONY's copper-copper connection technology (b)
Fig. 5. (a) Sea rainfall imaging; (b) Drug bottle label imaging; (c) Chip alignment marking; (d) Semiconductor crack detection
Fig. 7. Thermal imaging and responsivity of short and medium wavelength at 77 K
Table 1. Imaging characteristics and application fields of SWIR
View tableView in ArticleTable 1. Imaging characteristics and application fields of SWIR
Imaging characteristics Application fields Based on room temperature target reflection imaging, clear details Night vision imaging application Fingerprint characteristics for substance identification Spectral imaging Eye safety laser 155X nm detection and positioning Optical fiber detection, satellite internet Thermal radiation imaging of high temperature targets Missile plume detection Strong ability to wear fog, haze, sand, smoke and glass Imaging detection under harsh conditions Camouflage recognition, wig, fake beard recognition Anti-terrorism application The water has strong absorption of short waves, and the water target has a large contrast Maritime border security, early warning Operation at or near room temperature, small size, light weight, low energy consumption Apply to the cell-phone's imaging
Table 2. The latest development of SWIR companies in the US
View tableView in ArticleTable 2. The latest development of SWIR companies in the US
Corporate name Format Spectral range/μm Pitch/μm Performance SUI 640×512 1280×1024 0.7-1.7 0.5-1.7 12.5 12.5 The plane array frame frequency is 60 Hz Quantum efficiency （QE） ≥65% Pixel operability≥99% The detectivity in 60 Hz mode is 2.8×1013 cm·Hz1/2·W−1 ROIC noise is 25 e− Dynamic range is 1850:1 1024×1 2048×1 0.8-1.7 0.99-1.61 25 10 Linear array （2048×1） maximum frame frequency is 12 kHz QE>70% Pixel operability is 99% Dynamic range (Low gain mode) >2100:1 Teledyne Princeton Instruments 640×512 0.9-1.7 20 NIRvana HS： QE>80% （1-1.6 μm ） Frame frequency is 250 Hz Dark current is 500 e−·pixel−1·s−1 @ −55 °C ROIC noise<60 e− 1024×1 0.8-1.7 0-2.2 25 Linear array QE>85% ROIC noise is 400 e− Minimum dark current is 5.7 ke−·pixel−1·s−1 Princeton Infrared Technologies 1280×1024 0.4-1.7 12 QE>75% （1-1.6 μm） ROIC noise<45 e− Maximum frame frequency is 100 Hz Dynamic range≥3000:1 1024×1 0.4-1.7 12.5 Linear array ROIC noise<75 e− Dynamic range>6000:1 FILR 640×512 0.9-1.7 0.6-1.7 15 QE>60% Maximum frame frequency is 180 Hz Pixel operability is 99.8% 1920×1080 0.9-1.7 10 ROIC noise<30 e−（High gain mode） Frame frequency is 16 outputs≥120 Hz Teledyne Technologies 512×1 1024×1 0.95-1.7 25 12.5 Frame frequency is 49 kHz QE (typical) is 66% Dark current<5 pA
Table 3. The development of NIT SWIR products
View tableView in ArticleTable 3. The development of NIT SWIR products
Product name Format Pitch/μm Performance WiDy SWIR 320 320×256 25 Frame frequency is 200 Hz QE is 70% Dynamic range is 120 dB WiDy SenS 640 640×512 15 Frame frequency is 230 Hz QE>70% Maximum dynamic range is 120 dB SenS 1280 1280×1024 10 Frame frequency is 60 Hz QE>85% Maximum dynamic range is 61 dB Dark current is 50 ke−·pixel−1·s−1 ROIC noise<30 e− HiPe SenS 640 640×512 15 Frame frequency is 230 Hz QE is 90% Dark current<1.5 ke−·pixel−1·s−1 @20 °C ROIC noise<30 e− LiSa SWIR 2048 2048×1 7.5 Frame frequency is 60 kHz QE>85% Minimum ROIC noise is 250 e−
Table 4. The performance of Cardinal series
View tableView in ArticleTable 4. The performance of Cardinal series
Product name Cardinal 640 Cardinal 1280 Format 640×512 1280×1024 Pitch/μm 15 10 QE >80% >80% Dark current/density @280 K <1.5 nA/cm2 <1 fA Frame frequency/Hz 350 150 Pixel operability ≥99.5% >99.5%
Table 5. Xenics SWIR products
View tableView in ArticleTable 5. Xenics SWIR products
Product name Format Spectral range/μm Pitch/μm Performance Bobcat-320-Gated 320×256 0.9-1.7 20 Frame frequency is 400 Hz，QE is 80% Dynamic range is 61 dB，ROIC noise is 60 e− Dark current is 190 ke−·pixel−1·s−1@200 mV, 288 K Bobcat-640 640×512 0.5-1.7 20 Frame frequency is 100 Hz，QE is 80% Dynamic range is 60 dB，ROIC noise is 120 e− Dark current<100 ke−·pixel−1·s−1@150 mV, 288 K Xeva-320 320×256 0.5-1.7 30 Frame frequency is 344 Hz，QE is 80% Dynamic range is 70 dB，ROIC noise is 150 e− Dark current<10 ke−·pixel−1·s−1@223 K Cheetah-640 640×512 0.5-1.7 20 Frame frequency is 1730 Hz，QE is 80% Dynamic range is 60 dB，ROIC noise is 120 e− Dark current<100 ke−·pixel−1·s−1@150 mV, 288 K Manx R 2048×1 0.9-1.7 12.5 Frame frequency is 256 kHz，QE is 80% Dynamic range is 69 dB，ROIC noise is 350 e− Dark current<1.6 Me−·pixel−1·s−1@100 mV, 293 K
Table 6. The research and development of short wavelength infrared detectors in some domestic research institutes
View tableView in ArticleTable 6. The research and development of short wavelength infrared detectors in some domestic research institutes
Research unit Format Spectral range/μm Performance Shanghai Institute of Technical Physics, Chinese Academy of Sciences 1280×1024 0.9-1.7 Blind pixel rate<1% Response non-uniformity is 6.4% Dark current density>5 nAcm2@300 K Peak detectivity>5×1012 cm·Hz1/2·W−1@300 K 1024×32 0.9-2.2 Blind pixel rate is 0.44%， Response non-uniformity is 5.7%，QE is 81.7% (1.6 μm) Peak detectivity is 2.5×1012 cm·Hz1/2·W−1@200 K 1024×512 0.95-2.5 Peak detectivity is 8×1011 cm·Hz1/2·W−1@200 K Response non-uniformity is 6% Frame frequency>250 Hz 2560×2048 0.9-1.7 Blind pixel rate is 0.26% Response non-uniformity is 3.81% Peak detectivity is 1.11×1013 cm·Hz1/2·W−1 Guohui Optoelectronics 640×512 0.9-1.7 Pixel pitch is 15 μm，QE≥65% Detectivity≥5×1012cm·Hz1/2·W−1 ROIC noise is 50 e−（High gain mode） Dynamic range is 120 dB （Logarithmic mode） Response non-uniformity<3% Pixel operability>99.5% Minimum frame frequency is 340 Hz 1280×1024 0.9-1.7 Pixel pitch is 15 μm Dark current density is 2.25 nA/cm2@25 ℃ Detectivity is 1.1×1013cm·Hz1/2·W−1 ROIC noise is 48 e− QE is 88%@1.55 μm Pixel operability>99%[ 29 ]The 44 th Research Institute of China Electronics Technology Group Corporation 320×240 1.0-1.7 Peak detectivity is 6.7×1012 cm·Hz1/2·W−1 QE>65% 256×1 0.9-1.7 Peak detectivity is 1.2×1012 cm·Hz1/2·W−1 Response non-uniformity is 3.87% 0.9-2.4 Peak detectivity is 3.25×1010 cm·Hz1/2·W−1 Response non-uniformity is 11%
Tools
Get Citation
Copy Citation Text
Xu Ma, Yunxue Li, Runyu Huang, Haifeng Ye, Zepeng Hou, Yanli Shi. Development and application of short wavelength infrared detectors (Invited)[J]. Infrared and Laser Engineering, 2022, 51(1): 20210897
Paper Information
Category: Infrared technology and application
Received: Nov. 25, 2021
Accepted: --
Published Online: Mar. 8, 2022
The Author Email: Shi Yanli (ylshikm@hotmail.com)
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20