[1] [1] KUANG Cui-fang, FENG Qi-bo, ZHANG Bin, et al. Study of the method for measuring four-degree-of-freedom geometric errors of a linear stage ［J］. Chinese Journal of Lasers, 2005, 32(9): 1266-1270.

[2] [2] LIU C H, JYWE W Y, HSU C C, et al. Development of a laser-based high-precision six-degrees-of-freedom motion errors measuring system for linear stage［J］. Review of Scientific Instruments, 2005, 76(5): 055110

[3] [3] WANG W, KWEON S H, Hwang C S, et al. Development of an optical measuring system for integrated geometric errors of a three-axis miniaturized machine tool［J］. The International Journal of Advanced Manufacturing Technology, 2009, 43(7-8): 701-709.

[4] [4] FANG Chao, XIANG Yang. Design of centering system by using collimation and interference with two channels［J］. Acta Photonica Sinica, 2012, 41(10): 1180-1185.

[5] [5] FAN K C, ZHAO Y. A laser straightness measurement system using optical fiber and modulation techniques［J］. International Journal of Machine Tools and Manufacture, 2000, 40(14): 2073-2081.

[6] [6] FENG Qi-bo, LIU Yi-zhen, ZHAN Bin, et al. A simple laser collimator based on single-mode fiber-coupled laser module ［J］. Chinese Journal of Scientific Instrument, 2005, 26(1): 28-31.

[7] [7] SUZUKI T, TAKAHASHI T, SASAKI O. Disturbance-free phase-shifting laser diode interferometer using adaptive feedback control［J］. Applied Optics, 2009, 48(29): 5561.

[8] [8] LI Jie-an, TAN Jiu-bin, CUI Ji-wen. Study on method of feedback compensation drift of collimation beam based on filter［J］. Journal of Optoelectronics Laser, 2013, 24(2): 336-342.

[9] [9] FENG Q, ZHANG B, CUI C, et al. Development of a simple system for simultaneously measuring 6DOF geometric motion errors of a linear guide［J］. Optics Express, 2013, 21(22): 25805-25819.

[10] [10] CUI C, FENG Q, ZHANG B, et al. System for simultaneously measuring 6DOF geometric motion errors using a polarization maintaining fiber-coupled dual-frequency laser［J］. Optics Express, 2016, 24(6): 6735-6748.

[11] [11] ZHU F, TAN J, CUI J. Common-path design criteria for laser datum based measurement of small angle deviations and laser autocollimation method in compliance with the criteria with high accuracy and stability［J］. Optics Express, 2013, 21(9): 11391-11403.

[12] [12] CHEN B, XU B, YAN L, et al. Laser straightness interferometer system with rotational error compensation and simultaneous measurement of six degrees of freedom error parameters［J］. Optics Express, 2015, 23(7): 9052-9073.

[13] [13] SHAN Cheng-yu. Temperature′s effect on semiconductor laser performance parameter ［J］. Jilin Normal University Journal, 2003, 24(4): 95-97.

[14] [14] ZHANG Hang, YU Xi, PAN Hao, et al. Calculation of correlated color temperature in optical simulations for white LEDs［J］. Chinese Journal of Luminescence, 2015, 36(5): 583-587.

[15] [15] ZHUANG Zhe-min, ZHANG Cong-you, YANG Jin-yao, et al. Investigation on visual background extractor based on gray feature and adaptive threshold［J］. Journal of Electronics & Information Technology, 2015, 37(2): 346-352.

[16] [16] GUO Yu-bo, YAO Yu, DI Xiao-guang. Improved sub-pixel algorithm［J］.Opto-electronic Engineering, 2006, 33(10): 137-140.

[17] [17] CHI Feng, ZHU Yu, ZHANG Zhi-ping, et al. Environment compensation technologies in dual-frequency laser interferometer measurement system［J］. Chinese Journal of Lasers, 2014, 41(4): 190-196.

[18] [18] DANG Min, FENG Qi-bo. Methods of improving accuracy of laser collimation［J］. Photon Technology, 2006(4):190-193.

[19] [19] ANDREWS L C, PHILLIPS R L. Laser beam propagation through random media［M］. Bellingham, Washington: SPIE press, 2005:63-64.