Opto-Electronic Engineering, Volume. 50, Issue 6, 230005(2023)

Research progress of solar-blind UV photodetectors based on amorphous gallium oxide

Yan Xiao... Sishuo Yang, Lingyun Cheng, You Zhou and Lingxuan Qian* |Show fewer author(s)
Author Affiliations
  • National Key Laboratory of Electronic Thin Films and Integrated Devices, School of Integrated Circuit Science and Engineering (Exemplary School of Microelectronics),University of Electronic Science and Technology of China, Chengdu, Sichuan 611731, China
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    Figures & Tables(16)
    Crystal structures of amorphous, mixed, and crystalline Ga2O3[36]
    (a) Schematic diagram and photograph of the gallium-oxide MSM photodetectors; (b) TEM images of the gallium oxide films deposited by RFMS and MBE; (c) I-V characteristics and (d) transient response of the MSM photodetectors based on a-Ga2O3 and β-Ga2O3 thin films[30]
    (a) I-V curves in dark and (b) under UV 254 nm light illumination; (c) Temporal response tests of the PDs with KrF pulse laser illumination at 10 V bias[32]
    (a) I−V characteristics and (b) I-T characteristics of the devices fabricated at various growth temperatures[58]; (c) Responsive characteristics and (d) I-T characteristics of the devices fabricated at various growth temperatures[59]
    (a) Film roughness fitting results from XRR and AFM; (b) Top: fitting curve of film density from SE and XRR. Medium: the variation trend of the a-GaOx bandgap. Bottom: Variation trend of Ga/O ratio based on XPS analysis[60]
    (a) The I-V characteristics of the detectors based on a-GaOx film and Mg: GaOx film under dark and 255 nm illumination conditions; (b) Time-dependent photocurrent of devices based on different amorphous films[42]
    (a) Schematic illustration of the flexible photodetector; (b) SEM image of the Ag NWs electrode; (c) Variations in photocurrent of the device[68]
    (a) Schematic of the a-Ga2O3/ITO prototype device; (b) I−V characteristics of the devices fabricated at various growth temperatures in dark; (c) Schematic of band alignment of the Ga2O3/ITO heterojunction; (d) The I–T characteristic of the detector[70]
    (a) Schematic diagram of the a-Ga2O3/p-Si heterojunctions photodetector, the enlarged view shows a cross-sectional view of the device; (b) The I–T characteristic of the detector without oxygen plasma treatment; (c) The I–T characteristic of the detector with oxygen plasma treatment[71]
    (a) Schematic diagram of the fabrication steps of 3D urchin-like VO-Ga2O3/ZnO; (b) The I–T characteristic of the detector[72]
    (a) Schematic structure of the GR/a-Ga2O3 flexible PD; (b) Schematics of the band diagram and the carrier transport mechanism of the GR/a-Ga2O3 under light irradiation[73]
    (a) Cross-section image of the as-fabricated GaOx phototransistor; (b) IDS-VG transfer characteristics measured at different VDS in the dark and under 254 nm light illumination[74]
    (a) IDS-VGS curves and IGS-VGS curves of the a-Ga2O3 TFTs with and without channel patterned; (b) Suppression of the PPC with a positive gate pulse[75]
    (a) The photomask with letters “CAS” and (b) the image obtained from the imaging system[74]; (c) Schematic diagram of the optical imaging system and (d) the obtained "C" pattern [82]; (e) Schematic diagram of the PDs array and (f) the obtained "E" pattern [83]
    (a) Schematic of the 3D Ga2O3 photodetector array, photograph and microscope image of an individual photodetector cell; (b) I-T curves of the photodetector at 15 V without bending and after 500 and 2000 bending cycles[80]
    • Table 1. Summary of parameters of recently reported a-Ga2O3 SBPDs

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      Table 1. Summary of parameters of recently reported a-Ga2O3 SBPDs

      StructureMaterialMethodIdark/nAR/(A/W)D*/(Jones)tr/std/sRef.
      MSMa-Ga2O3RFMS0.3470.261.2×10140.41/2.040.02/0.35[30]
      a-Ga2O3ALD0.2045.112.9×10−61.48×10−4[31]
      a-Ga2O3RFMS~10−30.191.91/8.07×10−5[32]
      a-Ga2O3RFMS4.9436.38×10−82.1×10−4[57]
      a-Ga2O3RFMS49.41380.52/3.880.32/4.00[59]
      a-Ga2O3ALD~10−433.90.02/0.070.02/0.04[61]
      a-Ga2O3RFMS1.27×10−30.198.39×10130.048/0.4190.036[62]
      In: a-Ga2O3RFMS0.0290.260.02/0.75[33]
      In: a-Ga2O3RFMS18.060.49/1.33×10−50.23/2.3×10−3[63]
      Mg: a-Ga2O3MOCVD0.0480.14~0.02~0.15[42]
      Tm: a-Ga2O3PLD0.0360.4472.26×10120.070.02[64]
      a-Ga2O3RFMS0.1143.996.142.32[65]
      Junctiona-Ga2O3/ITORFMS~15.9×1041.8×1014[70]
      a-Ga2O3/p-SiRFMS1.04×1059.97×10−32.45×10−31.83×10−3[71]
      a-Ga2O3/ZnOALD7.97×10−31.16×10110.151.1[72]
      a-Ga2O3/GRRFMS~10−322.758.2×1013[73]
      TFTa-Ga2O3RFMS1004.1×1032.5×101350400[74]
      a-Ga2O3RFMS~10−35.67×1031.87×10155×10−3[75]
      CdO: a-Ga2O3SPD1.61×10−32.171.71×1012[76]
      a-Ga2O3mist-CVD2.3×1031.87×1014106[77]
      a-Ga2O3RFMS1041×1015[78]
      a-Ga2O3/IGZORFMS~10−44.8×1038×10150.096[79]
      Arraya-Ga2O3RFMS0.178.9<1.5×10−50.3/1.7×10−3[80]
      a-Ga2O3RFMS3×10−47333.9×1016<1×10−30.018/0.091[81]
      a-Ga2O3RFMS16.416.341.19×10130.10/1.730.20/3.40[82]
      a-Ga2O3RFMS6.6×10−31021.81.66×10160.1440.208[83]
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    Yan Xiao, Sishuo Yang, Lingyun Cheng, You Zhou, Lingxuan Qian. Research progress of solar-blind UV photodetectors based on amorphous gallium oxide[J]. Opto-Electronic Engineering, 2023, 50(6): 230005

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    Paper Information

    Category: Article

    Received: Jan. 5, 2023

    Accepted: Mar. 9, 2023

    Published Online: Aug. 9, 2023

    The Author Email:

    DOI:10.12086/oee.2023.230005

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