Opto-Electronic Engineering, Volume. 50, Issue 6, 230005(2023)
Research progress of solar-blind UV photodetectors based on amorphous gallium oxide
Fig. 1. Crystal structures of amorphous, mixed, and crystalline Ga2O3[36]
Fig. 2. (a) Schematic diagram and photograph of the gallium-oxide MSM photodetectors; (b) TEM images of the gallium oxide films deposited by RFMS and MBE; (c) I-V characteristics and (d) transient response of the MSM photodetectors based on a-Ga2O3 and β-Ga2O3 thin films[30]
Fig. 3. (a) I-V curves in dark and (b) under UV 254 nm light illumination; (c) Temporal response tests of the PDs with KrF pulse laser illumination at 10 V bias[32]
Fig. 5. (a) Film roughness fitting results from XRR and AFM; (b) Top: fitting curve of film density from SE and XRR. Medium: the variation trend of the a-GaOx bandgap. Bottom: Variation trend of Ga/O ratio based on XPS analysis[60]
Fig. 6. (a) The I-V characteristics of the detectors based on a-GaOx film and Mg: GaOx film under dark and 255 nm illumination conditions; (b) Time-dependent photocurrent of devices based on different amorphous films[42]
Fig. 7. (a) Schematic illustration of the flexible photodetector; (b) SEM image of the Ag NWs electrode; (c) Variations in photocurrent of the device[68]
Fig. 8. (a) Schematic of the a-Ga2O3/ITO prototype device; (b) I−V characteristics of the devices fabricated at various growth temperatures in dark; (c) Schematic of band alignment of the Ga2O3/ITO heterojunction; (d) The I–T characteristic of the detector[70]
Fig. 9. (a) Schematic diagram of the a-Ga2O3/p-Si heterojunctions photodetector, the enlarged view shows a cross-sectional view of the device; (b) The I–T characteristic of the detector without oxygen plasma treatment; (c) The I–T characteristic of the detector with oxygen plasma treatment[71]
Fig. 10. (a) Schematic diagram of the fabrication steps of 3D urchin-like VO-Ga2O3/ZnO; (b) The I–T characteristic of the detector[72]
Fig. 11. (a) Schematic structure of the GR/a-Ga2O3 flexible PD; (b) Schematics of the band diagram and the carrier transport mechanism of the GR/a-Ga2O3 under light irradiation[73]
Fig. 12. (a) Cross-section image of the as-fabricated GaOx phototransistor; (b) IDS-VG transfer characteristics measured at different VDS in the dark and under 254 nm light illumination[74]
Fig. 13. (a) IDS-VGS curves and IGS-VGS curves of the a-Ga2O3 TFTs with and without channel patterned; (b) Suppression of the PPC with a positive gate pulse[75]
Fig. 15. (a) Schematic of the 3D Ga2O3 photodetector array, photograph and microscope image of an individual photodetector cell; (b) I-T curves of the photodetector at 15 V without bending and after 500 and 2000 bending cycles[80]
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Yan Xiao, Sishuo Yang, Lingyun Cheng, You Zhou, Lingxuan Qian. Research progress of solar-blind UV photodetectors based on amorphous gallium oxide[J]. Opto-Electronic Engineering, 2023, 50(6): 230005
Category: Article
Received: Jan. 5, 2023
Accepted: Mar. 9, 2023
Published Online: Aug. 9, 2023
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