Acta Photonica Sinica, Volume. 46, Issue 10, 1014004(2017)
Hole Morphology in Femtosecond Laser Drilling of Silicon
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LI Zhi-ming, WANG Xi, NIE Jin-song. Hole Morphology in Femtosecond Laser Drilling of Silicon[J]. Acta Photonica Sinica, 2017, 46(10): 1014004
Paper Information
Received: Apr. 26, 2017
Accepted: --
Published Online: Nov. 24, 2017
The Author Email: Zhi-ming LI (774762592@qq.com)
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