Fig. 1. System of vacuum electron bombardment test

Fig. 2. Principle of electron multiplication

Fig. 3. Electron bombardment response curve

Fig. 4. Electron bombardment response curve of BCMOS with Al₂O₃ film of different thickness

Fig. 5. Response energy corresponding to different thin film thickness

Fig. 6. Increasing percentage of the multiplier electron collection efficiency varies with the film thickness

Fig. 7. Effect of energy band distribution on secondary electron collection before and after passivation

Fig. 8. Average dark current of BCMOS sensor under different conditions