[1] [1] H. A. Macleod. Thin-Film Optical Filters［M］. London: Taylor & Francis, 1999. 257～345

[2] [2] Zhong Disheng. Vacuum Deposition［M］. Shenyang: Press of Liaoning University, 2001. 42～48

[3] [3] Pan Yongqiang, Huang Guojun. Study on infrared optical properties of amorphous silicon films deposited by ion beam assisted deposition［J］. J. Xi′an Technological University, 2011, 31(1): 9～13

[4] [4] J. E. Gerbi, P. M. Voyles, M. M. J. Treacy et al.. Increasing medium-range order in amorphous silicon with low-energy ion bombardment［J］. Appl. Phys. Lett., 2003, 82(21): 3665～3667

[5] [5] Duan Weibo, Liu Dingquan, Zhang Fengshan. Study on optical properties of two thin film materials in medium-wave infrared band［J］. Acta Optica Sinica, 2009, 29(s1): 177～180

[6] [6] Shaowei Wang, Dingquan Liu, Xiaoshuang Chen et al.. Realization of integrated narrow bandpass filters in the infrared region［J］. Int. J. Infrared and Millimeter Waves, 2004, 25(11): 1677～1683