Journal of the Chinese Ceramic Society, Volume. 51, Issue 6, 1374(2023)
Control of Defects in MPCVD Single Crystal Diamond Growth Based on Metal Catalyzed Plasma Etching
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LI Yicun, WEN Dongyue, HAO Xiaobin, DAI Bing, LIU Benjian, ZHU Jiaqi, HAN Jiecai. Control of Defects in MPCVD Single Crystal Diamond Growth Based on Metal Catalyzed Plasma Etching[J]. Journal of the Chinese Ceramic Society, 2023, 51(6): 1374
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Received: Nov. 28, 2022
Accepted: --
Published Online: Aug. 13, 2023
The Author Email: Yicun LI (741624995@qq.com)
CSTR:32186.14.
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